Integration of Multicomponent Oxide Materials in Sensor Applications

Our research focuses on the development of oxide materials and the incorporation of these oxide materials in high performance transistor applications. Current investigations include beta-Ga2O3 MOSFETs, ZnO and InGaZO thin film transistors, and impurity doped ZnO thin films for transparent conductors. The research entails device design, fabrication, and testing, as well as optimization and analysis of material microstructural and morphological properties to achieve enhanced device performance with particular emphasis on ALD gate d...