CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment
CHIPS program offers funding for building/upgrading US semiconductor materials and equipment facilities with investments under $300M.
This grant is no longer accepting proposals
National Institute of Standards and Technology has archived this opportunity.
Funder: National Institute of Standards and Technology (NIST)
Due Dates: Rolling through November 1, 2026 (concept plans)
Funding Amounts: No specified ceiling or floor; awards vary by project and are based on project needs and program priorities.
Summary: Supports construction, expansion, or modernization of U.S. facilities for semiconductor materials and manufacturing equipment to strengthen domestic supply chains and national security.
Key Information: Applications must be submitted via the CHIPS Incentives Portal; two-phase process (concept plan, then full application by invitation).
Description
This opportunity is part of the CHIPS Incentives Program, administered by the National Institute of Standards and Technology (NIST) under the U.S. Department of Commerce. The program aims to catalyze long-term, economically sustainable growth in the U.S. semiconductor industry, supporting both economic and national security. This Notice of Funding Opportunity (NOFO) specifically seeks applications for projects involving the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment, with a focus on projects that contribute to robust domestic supply chains and vibrant U.S. semiconductor clusters.
The program is designed to supplement, not replace, private, state, and local investment, and seeks projects that demonstrate commercial viability, technical feasibility, and a strong workforce development strategy.
