CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment
CHIPS program offers funding for building/upgrading US semiconductor materials and equipment facilities with investments under $300M.
Funder: National Institute of Standards and Technology
Due Dates: October 29, 2027 (Concept plans) | Individually assigned (Invited full applications)
Funding Amounts: Award amounts vary by project; performance periods are negotiated
Summary: Supports construction, expansion, or modernization of U.S. commercial facilities producing semiconductor materials and manufacturing equipment.
Key Information: Applicants must have an offered state or local incentive and demonstrate that CHIPS funding enables otherwise-unrealized investment.
Description
The CHIPS Incentives Program supports long-term, economically sustainable growth in the domestic semiconductor industry to strengthen U.S. economic and national security. Administered by the CHIPS Program Office within NIST, this funding opportunity supports investment in the construction, expansion, or modernization of commercial facilities in the United States producing semiconductor materials or semiconductor manufacturing equipment.
The program prioritizes vibrant U.S. semiconductor fabrication clusters, resilient supply chains, and U.S. technology leadership. Materials facilities may produce chemicals, gases, raw and intermediate materials, and other semiconductor manufacturing consumables. Equipment facilities must physically produce specialized semiconductor manufacturing equipment or enabling subsystems. Federal incentives are intended to supplement other capital, catalyze private investment, and support commercially sustainable facilities with credible workforce and operational plans.
