Atom | CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment

Funder: National Institute of Standards and Technology (NIST)

Due Dates: Rolling through November 1, 2026 (concept plans)

Funding Amounts: No specified ceiling or floor; awards vary by project and are based on project needs and program priorities.

Summary: Supports construction, expansion, or modernization of U.S. facilities for semiconductor materials and manufacturing equipment to strengthen domestic supply chains and national security.

Key Information: Applications must be submitted via the CHIPS Incentives Portal; two-phase process (concept plan, then full application by invitation).

CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment

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