Description

This postdoctoral research opportunity at the Naval Research Laboratory (NRL) focuses on spectroscopic studies of plasma processing, which are essential for developing fundamental models and sensors to exploit high-density plasmas in materials processing. The research involves gas phase diagnostics to identify and track reactive atoms, molecules, and ions in plasma processes. Using noninvasive, real-time, in situ spectroscopic techniques, the project aims to reveal the dynamics of energy transfer from electromagnetic power sources into the gas phase and ultimately to the surface undergoing transformation.

Key techniques include analysis of Stark and Zeeman splitting in atomic spectra to quantify electromagnetic field strength and coupling, and laser-induced fluorescence to measure spatial distributions of chemical species. These measurements help benchmark electron, ion, and neutral chemistry models. The work is conducted in close collaboration with plasma physicists (both theoretical and experimental), surface chemists, and processing experts at NRL.

The primary experimental setup includes an inductively coupled power source operating in continuous wave or pulse-modulated modes, a radio frequency biased stage for 4” wafers, and a differentially pumped mass spectrometer for flux characterization. Laser resources include Nd3+:YAG, excimer pumped dye lasers, tunable infrared diode laser spectrometers, Fourier-transform IR spectrometers, and advanced CCD detectors with image intensifiers for spectral and spatially resolved detection.

Keywords

• Etching
• Laser-induced fluorescence
• Modeling
• Optical emission
• Plasma processing
• Pulsed plasma
• Spectroscopy